Actuation voltage signal-shaping for smooth scanning beam locus of a light steering system with a dual-axis analog MEMS pointing mirror

作者：Won Jong Seob; Choi Hae Woon; Park Jae Joon; Lee Seon Bong^*

来源：Microelectronic Engineering, 2013, 110: 12-20.

DOI：10.1016/j.mee.2013.04.018

• Electromagnetic actuation
• Reflection law of light
• Micro-mirror
• Light steering system (LSS)
• Laplace Transform

This paper presents an electromagnetic actuation scheme for driving a dual-axis analog MEMS pointing mirror that is used in multiple light steering applications. In this study, a light steering system, which consists of dual-axis analog MEMS pointing mirror and a laser diode as a light source, is established and its actuation scheme is proposed to provide a framework for generating high performance display. The main feature of the proposed actuation scheme is to determine the shapes of electromagnetic actuation voltage signals based on the mirror dynamics and employment of the Laplace Transform. Simulation and experimental studies were conducted to evaluate the proposed actuation strategy. It is shown from both results that it is a simple but viable solution for operating light steering systems.

• 出版日期2013-10