科研之友
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摘要
A rapid and reliable detection system is needed in the area of label-free calorimetric measurement for monitoring biochemical reactions. In this paper, a thermal biosensor employing a Si/SiGe quantum well is proposed where the infrared radiation energy is carefully considered to increase the sensor's sensitivity. It applies a suspended functional film with a trench across the multilayers. A polydimethylsiloxane cover for the microfluidic channel is bonded with the sensor for the injection and removal of a small volume of solution (down to 500 nL). The resistance change of Si/SiGe quantum well material is read out through the wire bonding connection to the conductive pads of the sensor. A linear detection range from 0.5 to 150 mM and a relative standard deviation less than 1% are demonstrated in the enzymatic reaction test with urea solution. Characterizations on the quantum well film verifies a high temperature coefficient of resistance value and fine crystal lattice, which promises a notable sensitivity. The application of the wafer level transfer bonding process makes the sensor fabrication convenient and cost-effective.
- 出版日期2013-4
