Numerical study of the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations

作者：Kong, F. R.; Zhang, Z. L.^*; Jiang, B. H.

来源：AIP Advances, 2018, 8(7): 075009.

DOI：10.1063/1.5036634

• PRESSURE PE-CVD
• FILMS

In this work involving an atmospheric dielectric barrier discharge system, the feasibility of independence control of key plasma parameters through strategic modulation of applied dual-frequency excitation sources is demonstrated. In this paper, a one-dimensional fluid model with semi-kinetic method has been used to investigate the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations. Bearing good consistency and coherence with experimental results, the electrical characteristics and typical electron dynamics are studied numerically. It is revealed that the application of the high frequency excitation can restrain the increment of the low frequency current component and is effective in preventing the discharge from transitioning to a filamentary mode. This method then suggests and enables possible approaches to obtain discharges with good stability in described DBD systems.

• 出版日期2018-7
• 单位哈尔滨工业大学