Atomic layer deposition of transparent semiconducting oxide CuCrO2 thin films

作者:Tripathi T S; Niemela Janne Petteri; Karppinen Maarit
来源:Journal of Materials Chemistry C, 2015, 3(32): 8364-8371.
DOI:10.1039/c5tc01384d

摘要

Atomic layer deposition (ALD) is a vital gas-phase technique for atomic-level thickness-controlled deposition of high-quality thin films of CuCrO2 on various substrate morphologies owing to its self-limiting gas-surface reaction mechanism.

  • 出版日期2015