科研之友
微信
新浪微博
Facebook
分享链接
摘要
We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only similar to 0.32 mm in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi (1 psi = 51.72 Torr) and a frequency response up to 2 MHz. In addition, the sensor's F-P cavity can be set from micrometers to millimeters with a precision of several nanometers. With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capability.
- 出版日期2005-12-15
