A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface

作者：Mao, Shuai; Hu, Peng-Cheng^*; Ding, Xue-Mei; Tan, Jiu-Bin

来源：Review of Scientific Instruments, 2016, 87(8): 083108.

DOI：10.1063/1.4960661

• 6-DEGREE-OF-FREEDOM MEASUREMENT SYSTEM
• HETERODYNE INTERFEROMETER
• MOTION ERRORS
• COMPENSATION
• ACCURACY

A fiber-coupled displacement measuring interferometer capable of determining of the posture of a reflective surface of a measuring mirror is proposed. The newly constructed instrument combines fiber-coupled displacement and angular measurement technologies. The proposed interferometer has advantages of both the fiber-coupled and the spatially beam-separated interferometer. A portable dual-position sensitive detector (PSD)-based unit within this proposed interferometer measures the parallelism of the two source beams to guide the fiber-coupling adjustment. The portable dual PSD-based unit measures not only the pitch and yaw of the retro-reflector but also measures the posture of the reflective surface. The experimental results of displacement calibration show that the deviations between the proposed interferometer and a reference one, Agilent 5530, at two different common beam directions are both less than +/- 35 nm, thus verifying the effectiveness of the beam parallelism measurement. The experimental results of angular calibration show that deviations of pitch and yaw with the auto-collimator (as a reference) are less than +/- 2 arc sec, thus proving the proposed interferometer's effectiveness for determination of the posture of a reflective surface. Published by AIP Publishing.

• 出版日期2016-8
• 单位哈尔滨工业大学