MEMS-actuated wavelength drop filter based on microsphere whispering gallery modes

作者:Blue Robert*; Li Li; Flockhart Gordon M H; Uttamchandani Deepak
来源:Journal of Micromechanics and Microengineering, 2011, 21(11): 115020.
DOI:10.1088/0960-1317/21/11/115020

摘要

MEMS-enabled tuneable optical coupling between optical microsphere resonators and optical fibre waveguides is reported. We describe the design, fabrication and experimental characterization of a MEMS platform, based on electrothermal actuators, which controls the resonator-to-waveguide separation. We compare the simulated and experimental displacements of the actuators in an unloaded and loaded state, where the load is a 1 mm optical spherical resonator. We then demonstrate the proof of concept application of selective wavelength dropping using the MEMS platform by modulating the coupling between the spherical resonator and a tapered optical fibre waveguide.

  • 出版日期2011-11