A real-time quantitative assessment of self-assembled quantum dots by reflection high-energy electron diffraction

作者：Rajapaksha Chandani; Freundlich Alex^*

来源：Microelectronics Journal, 2009, 40(3): 462-464.

DOI：10.1016/j.mejo.2008.06.034

• RHEED
• Real time
• Diffraction
• Self-assembled
• Quantum dot
• Quantitative

A method for in-situ quantitative characterization of quantum dots during growth is provided using the readily available reflection high-energy electron diffraction (RHEED). RHEED patterns of uncapped self-assembled InAs/GaAs quantum dots are investigated theoretically and experimentally. Previously predicted intensity fringes along chevron tails of quantum dot's RHEED diffraction spots are observed experimentally. Post-growth atomic force microscopic images and theoretical RHEED images of the same are obtained parallel to experimental data. The bounding facets of the quantum dots are determined using the angle between the chevrons. The size (height) of the quantum dots is determined using the periodicity of intensity fringes along the chevrons during growth.

• 出版日期2009-3