A quality photocatalytic activity of an amorphous titanium oxide film achieved using the selectively photochemical etching and its application for the organic light emitting diode encapsulation

作者：Chen Jian Zhi; Chen Tai Hong; Lai Li Wen; Huang Cheng Hao; Hong Shao Chyang; Liu Day Shan^*

来源：Microelectronic Engineering, 2015, 148: 5-9.

DOI：10.1016/j.mee.2015.07.011

• Selectively photochemical etching
• Amorphous titanium oxide
• Photocatalytic activity
• Organic light emitting diode
• Self-cleaning
• Light extraction efficiency

In this study, a rapid, cost-effective, and room-temperature achieved selectively photochemical etching (SPCE) process was developed to improve the photocatalytic activity of a PECVD-deposited amorphous titanium oxide (a-TiOx) film. The a-TiOx film treated by the SPCE process showed a photocatalytic activity comparable to that of a high-temperature prepared TiOx film. As examined from the surface roughness and morphologies, optical transmittance, and chemical bond configurations, the mechanism responsible for the significant enhancement on the photocatalytic activity was ascribed to the formation of the nano-textures with the increase in the surface acidity due to the incorporating of fluorine ions. The SPCE-treated a-TiOx film with the quality photocatalytic activity was then applied to encapsulate the blue organic light emitting diode (OLED) to result in the surface with self-cleaning function. A super-hydrophilic surface was available using the internal light irradiation. In addition, the OLED encapsulated by the SPCE-treated a-TiOx film also was beneficial for enhancing the light-extraction efficiency as a consequence of its notably nano-textured surface.

• 出版日期2015-12-1