A method for metallic stamp replication using nanoimprinting and electroforming techniques

作者：Zhou Ye; Luo Gang; A**ahi Mohamed; Eriksson Torbjorn; Keil Matthias; Ring Johan; Carlberg Patrick; Jiawook Rizgar^*; Heidari Babak

来源：Microelectronic Engineering, 2012, 91: 112-120.

DOI：10.1016/j.mee.2011.10.019

• Nanoimprinting
• Stamp replication
• Metallic stamp

A simple method for replicating metallic stamp from original masters via combined nanoimprint and electroforming is presented. In this work we demonstrate the generality of the method by replicating structures with dimensions ranged from several microns to sub-100 nm in large patterned area. The structures were transferred first into an intermediate polymer sheet (IPS) with good uniformity and high structural fidelity, and then this IPS was used as the galvano-template for nickel electroforming. The major advantage of the method relies on the pattern transfer occurred between a soft polymer and the hard master, thereby the risk of damaging the mold is extremely low.

• 出版日期2012-3