Autocollimators for deflectometry: Current status and future progress

作者：Geckeler Ralf D^*; Just Andreas; Krause Michael; Yashchuk Valeriy V

来源：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2010, 616(2-3): 140-146.

DOI：10.1016/j.nima.2009.11.021

• Autocollimator
• Angle
• Angle calibration
• Topography measurement
• Precision metrology
• Traceability

The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined.

• 出版日期2010-5-1