A novel method for measurement of small opaque objects using Fraunhofer diffraction in divergent light

作者：Chugui Yuri V^*; Yakovenko Nikolay A; Yaluplin Mikhail D

来源：Measurement Science and Technology, 2010, 21(5): 054012.

DOI：10.1088/0957-0233/21/5/054012

• dimensional measurement
• small opaque object
• Fraunhofer diffraction
• error

High accuracy dimensional measurement of small objects with nano- or subnanometre resolution is a very urgent problem especially applied to micromechanics and nanotechnology. A new high precision method for measurement of small opaque objects using Fraunhofer diffraction in divergent light is presented. The algorithm, based on contrast analysis of the diffraction Fraunhofer pattern at its centre, allows determination of the sought parameter with high precision within a range from a few to dozens of microns. Experimental results are presented.

• 出版日期2010-5