DESIGN OF A HIGH-RESOLUTION MICROFLUIDIC MICROWAVE MEMS PHASE SHIFTER

作者:Ozbey Burak; Ozturk Sule; Aktas Ozgur*
来源:Microwave and Optical Technology Letters, 2011, 53(8): 1902-1905.
DOI:10.1002/mop.26127

摘要

In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time.

  • 出版日期2011-8

全文