An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

作者：Jia Kemiao^*; Pal Sagnik; Xie Huikai

来源：Journal of Microelectromechanical Systems, 2009, 18(5): 1004-1015.

DOI：10.1109/JMEMS.2009.2023838

• Bimorph actuator
• microelectromechanical systems (MEMS)
• micromirror
• microoptoelectromechanical systems
• silicon-on-insulator (SOI)
• tip-tilt-piston (TTP)

This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micro machining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of +/- 30. about both x-and y-axes and displaces 480 mu m in the z-axis, all at dc voltages that are less than 8 V. Dynamic testing of the micromirror shows that the thermal response time of each actuator is about 10 ms. Resonant frequencies of the piston and rotation motion are 336 and 488 Hz, respectively. The unique structural design of the device ensures that there is no lateral shift for the piston motion and no rotation-axis shift for the rotation scanning. With the large tip-tilt-piston scan ranges and low driving voltage, this type of device is very suitable for biomedical imaging and laser beam steering applications. [2008-0171]

• 出版日期2009-10