摘要
A one-dimensional KBA microscope for diagnosis of planar targets, working at 4.75 keV, has been experimentally studied. According to the requirements of spatial resolution and working environments, the optical structure of one-dimensional KBA microscope was designed, and compared with conventional Kirkpatrick-Baez microscope. A double-periodic multilayer KBA mirror simultaneously working at 8 keV and 4.75 keV was adopted and manufactured to complete the system alignment. The 4.75 keV X-ray imaging experiment in XRL chamber of Shenguang II shows that the resolution is about 4 μm in all the illumination area of backlighter, and the effective field of the one-dimensional KBA microscope is limited by backlighter size.