A low-cost and highly integrated fiber optical pressure sensor system

作者：Ceyssens F^*; Driesen M; Wouters K; Puers R; Leuven K U

来源：Sensors and Actuators A: Physical , 2008, 145: 81-86.

DOI：10.1016/j.sna.2007.10.061

• optical sensors
• pressure sensors
• waveguides

This paper presents a simple, affordable, fiber-optic based pressure measurement system, in which both sensor and readout parts are constructed using batch micromachining techniques, supplemented with some straightforward assembly steps. Prototypes of relative and absolute pressure sensors parts and a readout part have been realized. Goal of this research is to enable deployment of such harsh-environment sensors in high-volume, low-cost applications.

• 出版日期2008-8