A study of high-quality freestanding diamond films grown by MPCVD

作者：Ding Ming Q^*; Li Lili; Feng Jinjun

来源：Applied Surface Science, 2012, 258(16): 5987-5991.

DOI：10.1016/j.apsusc.2012.02.025

• Microwave Plasma Chemical Vapor Deposition
• Freestanding diamond films
• Texture
• Optical transmission

The fabrication process of high-quality freestanding diamond films grown by Microwave Plasma Chemical Vapor Deposition (MPCVD) was studied. Under the optimal condition, freestanding diamond films 55 mm in diameter with a thickness up to 1 mm were fabricated, showing an excellent crystalline structure as examined from Raman and X-Ray Diffraction (XRD) spectra. For most processing conditions, including substrate temperatures varied from 800 to 1050 degrees C, the films were found in a [1 1 1] preferential texture, whereas [2 2 0] and [0 0 1] film textures occurred in some special cases. Optical measurements of one side polished diamond films showed a cutoff wavelength 225 nm, and a transmission >= 70% at lambda >= 2.5 mu m.

• 出版日期2012-6-1