An accurate and stable humidity sensing characteristic of Si FET-type humidity sensor with MoS2 as a sensing layer by pulse measurement

作者:Shin Jongmin; Hong Yoonki; Wu Meile; Bae Jong Ho; Kwon Hyuck In; Park Byung Gook; Lee Jong Ho
来源:Sensors and Actuators B: Chemical , 2018, 258: 574-579.
DOI:10.1016/j.snb.2017.11.132