DEPOSITION OF SINGLE-PHASE CuInSe2 THIN FILMS UNDER LOW VACUUM LEVEL BY A TWO-STAGE GROWTH TECHNIQUE

作者：Chu J B; Zhu H B; Wang Z A; Bian Z Q; Sun Z; Chen Y W; Huang S M^*

来源：Surface Review and Letters, 2009, 16(3): 381-386.

DOI：10.1142/S0218625X09012755

• CuInSe2
• solar cell
• sputtering
• selenization

Single-phase CuInSe2 films were grown by high vapor selenization of CuIn alloy precursors within a partially closed graphite box. The CuIn precursors were prepared using CuxIny alloy targets with different composition rates under low vacuum level by a homemade sputtering system. The Cu and In composition rates of the used targets are 11:9, 10:10, and 9:11, respectively. The metallic precursor films were selenized using a two-step temperature profile, i.e. at 250 degrees C and 400-500 degrees C, respectively. The influence of the temperature at the second selenization step on the quality of the CIS absorbing layers was investigated. The CIS films were characterized by X-ray diffractometry, scanning electron microscopy, energy dispersive X-ray analysis, and Raman spectroscopy. The deposited CIS absorbers selenized at a high temperature of 500 degrees C for 30 min exhibited a single-phase chalcopyrite structure with a preferential orientation in the (112) direction. These layers display uniform, large, and densely packed crystals with a grain size of about 3-5 mu m. Cadmium sulfide buffer layer was manufactured by chemical bath deposition method. Bilayers ZnO/ZnO:Al were prepared by RF magnetron sputtering deposition. CIS solar cells with an efficiency of about 6.5% were produced without antireflective films. The method to fabricate CIS solar cells by a combination of the low vacuum sputtering deposition and the graphite box selenization process has provided a simple control process and shown a promising potential for developing high efficient and low-cost CuInSe2 solar cells.

• 出版日期2009-6
• 单位华东师范大学