Analysis on heat resistance of the micro heat pipe with arteries

作者:Liu Weiting; Kang Jian; Fu Xin*; Stefanini Cesare; Dario Paolo
来源:Microelectronic Engineering, 2011, 88(8): 2255-2258.
DOI:10.1016/j.mee.2011.02.082

摘要

A novel design of micro heat pipe (MHP) with implanted arterial paths and an evaluation heat spreader are presented. The validation prototype is fabricated on substrates of silicon wafer and glass with lithography, micromachining and anodic bonding processes. MHP implanted with arteries is supposed to effectively limit the propagation of the dry-out region. In order to evaluate the thermal performance of this novel design of MHP, its heat resistance in different working conditions is analyzed. An experimental setup is then used to generate the working circumstances of MHP heat spreader. The experimental data indicate that the MHP with arteries could extend its working temperature range by 100%.

全文