AFM study of excimer laser patterning of block-copolymer: Creation of ordered hierarchical, hybrid, or recessed structures

作者:Svanda Jan; Siegel Jakub; Svorcik Vaclav; Lyutakov Oleksiy
来源:Applied Surface Science, 2016, 371: 203-212.
DOI:10.1016/j.apsusc.2016.02.234
  • 出版日期2016-5-15