A novel substrate LaBGeO5 lattice-matched to InN

作者:Miyazawa Shintaro*; Ichikawa Satoru; Liu Yuhuai; Ji Shiyang; Matsuoka Takashi; Nakae Hideo
来源:PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208(5): 1195-1198.
DOI:10.1002/pssa.201000909

摘要

As a novel substrate with a lattice-mismatch of only 0.8% along the a-axis to InN thin films, we propose LaBGeO5 (LBGO) with a trigonal symmetry for the first time. A single crystal growth of LBGO by Czochralski (Cz)-pulling was investigated, and c-axis-oriented LBGO single crystals with high crystallinity were successfully grown with a pulling rate of 0.5 mm/h in O-2-atomosphere. c-axis oriented InN film was subsequently grown on the obtained LBGO {001} substrate by metalorganic vapor epitaxy (MOVPE), and it was verified that InN film on LBGO was less-strained as compared with that on {001} sapphire substrate. It is stressed to say that LBGO can be expected as a lattice-matching substrate for the epitaxial growth of InN.

  • 出版日期2011-5