High Quality Planar Silicon Nitride Microdisk Resonators for Integrated Photonics in the Visible Wavelength Range

作者:Hosseini Ehsan Shah*; Yegnanarayanan Siva; Atabaki Amir Hossein; Soltani Mohammad; Adibi Ali
来源:Optics Express, 2009, 17(17): 14543-14551.
DOI:10.1364/OE.17.014543

摘要

High quality factor (Q approximate to 3.4 x 10(6)) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.

  • 出版日期2009-8-17