摘要
High quality factor (Q approximate to 3.4 x 10(6)) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.
- 出版日期2009-8-17