Drop casting of stiffness gradients for chip integration into stretchable substrates

作者：Naserifar Naser^*; LeDuc Philip R; Fedder Gary K

来源：Journal of Micromechanics and Microengineering, 2017, 27(4): 045018.

DOI：10.1088/1361-6439/aa63af

• stretchable electronics
• engineered substrate
• material gradient

Stretchable electronics have demonstrated promise within unobtrusive wearable systems in areas such as health monitoring and medical therapy. One significant question is whether it is more advantageous to develop holistic stretchable electronics or to integrate mature CMOS into stretchable electronic substrates where the CMOS process is separated from the mechanical processing steps. A major limitation with integrating CMOS is the dissimilar interface between the soft stretchable and hard CMOS materials. To address this, we developed an approach to pattern an elastomeric polymer layer with spatially varying mechanical properties around CMOS electronics to create a controllable material stiffness gradient. Our experimental approach reveals that modifying the interfaces can increase the strain failure threshold up to 30% and subsequently decreases delamination. The stiffness gradient in the polymer layer provides a safe region for electronic chips to function under a substrate tensile strain up to 150%. These results will have impacts in diverse applications including skin sensors and wearable health monitoring systems.

• 出版日期2017-4