A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection

作者：Wu Jing Tang; Yang Sen Yeu^*; Deng Wei Chih; Chang Wei Yi

来源：Microelectronic Engineering, 2010, 87(10): 1951-1954.

DOI：10.1016/j.mee.2009.12.004

• Gas-assisted hot embossing
• Sub-wavelength structures
• Anti-reflection

This paper presents a cost-effective method to fabricate tapered sub-wavelength structures (SWSs) on the polycarbonate (PC) film using gas-assisted hot embossing with anodic aluminum oxide (MO) template. The AAO template with arrayof high-aspect-ratio submicron holes was fabricated using a two-step anodization process. The soften polymer is then pressurized by gas to fill deep into the nano-holes, tapered SWSs could be generated by directly separating the PC film from AAO template during the demolding process. The heights were up to about 260 nm. The fabricated PC film reduces the reflectivity from 8.9% in a bare film to 2% with tapered SWSs at the wavelength of 550 nm. The AAO template can be used repeatedly.

• 出版日期2010-10