Direct electrical characterization of embedded ferroelectric lead titanate nanoislands

作者：Clemens S^*; Dippel A C; Schneller T; Waser R; Ruediger A; Roehrig S

来源：Journal of Applied Physics, 2008, 103(3): 034113.

DOI：10.1063/1.2838346

We report on the fabrication and characterization of lead titanate nanoislands on platinized silicon substrates embedded into a low-k dielectric. Our findings with Pt and Au as collective top electrodes are compared to previous results and thin films, and we discuss the coercive field and the remanent polarization with special care devoted to capacitive and leakage contributions of the nonpolar matrix. A direct electrical characterization of sub-100-nm ferroelectric nanoislands becomes feasible if they are measured in parallel, providing that the thin film material parameters of both ferroelectric and spin-on glass are independently determined.

• 出版日期2008-2-1