Angular distribution of the ion emission from a tin-based laser-produced plasma extreme ultraviolet source

作者：Morris O^*; O'Connor A; Sokell E; Dunne P

来源：Plasma Sources Science and Technology, 2010, 19(2): 025007.

DOI：10.1088/0963-0252/19/2/025007

The charge state and energy distributions of ions emitted from a Sn-based laser-produced plasma extreme ultraviolet source, formed at a power density of approximate to 4 x 10(11)Wcm(-2), have been recorded as a function of angle. Measurements were recorded from 20 degrees to 80 degrees with respect to the target normal. For each individual ion stage detected, more energetic ions showed preferential emission close to the target normal whereas the less energetic ions exhibited peak emission at larger angles. The peak in the observed ion emission moved to higher energies with increasing ionization at all angles. The sum of the emission, for each ion stage recorded, at each observed kinetic energy, decreased with increasing angle from the target normal.

• 出版日期2010-4