Active Vibration Damping of a White Light Interferometer

作者：Schaefer Patrick; Broschart Daniel; Seewig Joerg

来源：Technisches Messen, 2013, 80(1): 16-20.

DOI：10.1524/teme.2013.0003

• White light interferometry
• quadrature interferometry
• vibration damping
• closed loop control
• piezoelectric device
• environmental vibration

Environmental vibrations are always problematic in surface metrology. For this reason an active damping of measurement setups is an important component for a high measurement quality. As an example the practical realization of the damping of a White Light Interferometer (WLI) is presented here. A quadrature interferometer (QI) serves as reference measurement device which detects the vibrations between the measurement head and the measurement table. A closed loop control algorithm uses this information and delivers an actuating signal for the stabilization of the measurement head by means of a piezoelectric element.

• 出版日期2013