A comb driving magnetometer based on tunnel effect

作者：Tang Xue hua^*; You Zheng; Yang Yong jun; He Hong tao

来源：China International Conference on Nanoscience and Technology (ChinaNANO 2005), 2005-06-09 to 2005-06-11.

• tunnel-effect
• magnetometer
• MEMS
• comb-driving

In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of this magnetometer are discussed, including its structure, FEA analysis, machining processes and test results. The test results indicate that the chip is coincidental with the tunneling effect and the chip is capable of sensing the magnetic signal.

• 出版日期2007
• 单位清华大学