Nanogranular structures formed by combinatorial control processing of size-selected metal nanoparticles

作者:Huh Seung Hun; Riu Doh Hyung; Kim Chang Yeoul; Naono Yasutomo; Nakamura Tsuneyuki; Sugiyama Akinori; Nakajima Atsushi*
来源:Journal of Applied Physics, 2008, 103(9): 094317.
DOI:10.1063/1.2913056

摘要

Nanogranular films and lines, which are composed of size-selected Au, Ni, and Pt nanoparticles (NPs) and which exhibit an intermediate structure between that of the individual NPs and that of polycrystalline ones, were produced by a fully physical process. By using a combination of techniques such as lithography, lift-off, size selection, and aerosol deposition, well-designed Au lines (linewidth W=80 nm) and thickness-controlled rectangular patterns could be produced, while Ni and Pt NPs did not form continuous lines if the linewidth was less than W=150 nm. This difference might be explained by the extent of collision-induced surface melting during NP deposition onto the substrate.

  • 出版日期2008-5-1