Design and fabrication of a slot aperture with softened edge based on gray-tone coding method

作者：Wu, Cuicui^*; Gao, Fuhua; Huang, Dequan; Yang, Zejian; Guo, Yongkang; Du, Jinglei; Zhang, Yixiao

来源：Microelectronic Engineering, 2011, 88(8): 2180-2183.

DOI：10.1016/j.mee.2011.01.017

• Scalar diffractive theory
• Slot apodizer
• Gray-tone coding
• Serrated-aperture apodizer
• Shaping of laser beam

A novel method has been developed to design an aperture apodizer for high-power laser system. Unlike current methods having the edge serrated, the method in this paper introduces an assembly of transparent cells at the edge with varying cell size or cell pitch to modulate the transmission intensity, using gray-tone coding method as a reference. The new approach can overcome the difficulty of coordinating the long side and the short side when it comes to rectangular aperture faced by the traditional ways. Based on the scalar diffraction theory, the intensity distribution of laser beam propagating through the slot aperture with softened edge and then the spatial pinhole filter was simulated and contrasted with that of the traditional slot with sharp edge. Finally a slot structure with softened edge designed with this new method has been fabricated with a photolithographic operation.

• 出版日期2011-8
• 单位四川大学