Atomic layer deposition of uniform metal coatings on highly porous aerogel substrates

作者:Baumann Theodore F*; Biener Juergen; Wang Yinmin M; Kucheyev Sergei O; Nelson Erik J; Satcher Joe H Jr; Elam Jeffrey W; Pellin Michael J; Hamza Alex V
来源:Chemistry of Materials, 2006, 18(26): 6106-6108.
DOI:10.1021/cm061752g
  • 出版日期2006-12-26