Measurement of incident molecular temperature in the formation of organic thin films

作者:Abe Takahiro; Matsubara Ryosuke*; Hayakawa Munetaka; Shimoyama Akifumi; Tanaka Takaaki; Tsuji Akira; Takahashi Yoshikazu; Kubono Atsushi*
来源:Japanese Journal of Applied Physics, 2018, 57(3): 03EG13.
DOI:10.7567/JJAP.57.03EG13

摘要

To investigate the effects of incident molecular temperature on organic-thin-film growth by vacuum evaporation, quantitative analysis of molecular temperature is required. In this study, we propose a method of determining molecular temperature based on the heat exchange between a platinum filament and molecular vapor. Molecular temperature is estimated from filament temperature, which remains unchanged even under molecular vapor supply. The results indicate that our method has sufficient sensitivity to evaluate the molecular temperature under the typical growth rate used for fabrication of functional organic thin films.

  • 出版日期2018-3

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