科研之友
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摘要
A fast and reliable, fully integrated optofluidic optical attenuator is demonstrated. The concept employs only liquid and thus has no mechanically moving parts. Transparent and opaque aqueous liquid droplets are displaced using an on-chip electrowetting actuator and, due to the flexibility in the choice of liquids, various transmission spectra can be defined. The microfluidic attenuator system is fabricated using wafer-level bonding and dry film resists resulting in an ultra-compact (11 x 23 x 1.6 mm(3)) device requiring no external components for operation. The measured dynamic range of optical transmission is up to 47 dB, while the response times are below 100 ms for a 2 mm input beam. Using a novel double-actuator configuration, actuation speeds of the liquids of up to 39 mm s(-1) were measured.
- 出版日期2011-12
