Application of micro-ball bearing on Si for high rolling life-cycle

作者：Sinha Sujeet K^*; Pang Robin; Tang Xiaosong

来源：Tribology International, 2010, 43(1-2): 178-187.

DOI：10.1016/j.triboint.2009.05.015

• Micro-ball bearing
• Wear life-cycle

In this paper, we introduce a new class of micro-ball bearing that call be applied between two Si surfaces in relative motion where wear is a problem, Wide channel was created on one Si plate for all the ball bearings to roll within this channel rather than in individual grooves. This type of microbearings can be applied as friction reducers to micro- and nano-machines. The tribometer set-up consisted of a top plate (Si wafer), which was connected to a conventional bearing, resting on a bottom plate (also Si wafer) that was rotated at 300 and 500 RPM by a DC motor. Borosilicate glass microspheres, 53 +/- 3.7 mu m in diameter, were rotated between the two circular silicon plates (15 mm diameter) under a dead weight of 235 mu N and in high-humidity conditions (75% relative humidity (RH)). Tests on the plate with wide channel consistently exceeded 1 million cycles of rotation without failure of the bearing.

• 出版日期2010-2