Preparation of Uniform Metal Seed Arrays for Nucleation Studies

作者:Willis Matthew*; Alkire Richard
来源:Electrochemical and Solid-State Letters, 2008, 11(12): D94-D96.
DOI:10.1149/1.2992705

摘要

Electron-beam-induced deposition was used to create an ordered array of Pt seed clusters on a Au film onto which Cu was subsequently electrodeposited in the presence of additives. The Pt seed clusters were 25-30 nm diameter, positioned in square arrays of 200, 300, or 400 nm spacing, with overall dimensions of 5 x 5 mu m. Electrodeposition was carried out in an acid sulfate bath containing additives. Image analysis methods were used to evaluate the probability of finding Cu nuclei at a given distance from a Pt seed cluster, as well as finding the nearest neighbor to any deposited Cu nucleus.

  • 出版日期2008