An adaptable broadband MEMS vibratory gyroscope by simultaneous optimization of robustness and sensitivity parameters

作者：Esmaeili Ali; Kupaei Mehrnaz Aghanouri; Faghihian Hamed; Mirdamadi Hamid Reza^*

来源：Sensors and Actuators A: Physical , 2014, 206: 132-137.

DOI：10.1016/j.sna.2013.12.014

• MEMS gyroscope
• Adaptive gyroscope
• Broadband vibratory gyroscope
• Robustness
• Sensitivity
• Optimization algorithm

This article presents a novel method to optimize the sensitivity and robustness of MEMS vibratory gyroscopes with the help of a 3-DOF MEMS vibratory gyroscope with a 2-DOF-sense mode, which enables adjusting an adaptive trade-off between the precision and robustness for their different desirable importance ratios and a broadband range of frequency response. In this approach, a nonlinear optimization problem is defined in order to maximize both sensitivity and robustness. The design variables are spring constants and the operating frequency, the objective function is obtained regarding both sensitivity and robustness with weighting factors, and both equality and inequality constraint are defined based on the problem. To solve the problem, the Sequential Quadratic Programming (SQP) is applied and the optimized values of design variables, sensitivity and robustness are derived. Changing the weighting factors for the sensitivity and robustness, results in the adjustable values of the vibratory system parameters for different bands of frequency response. A comparison is made among a fully coupled gyroscope with no adjustment capability, an adjustable and fully coupled gyroscope, and an adjustable and broadband gyroscope. Then, they are simulated with different weighting factors. Comparing the results shows the superiority of the proposed adjustable as well as broadband gyroscope.

• 出版日期2014-2-1