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摘要
This paper employs higher order frequency response functions to describe the closed-form solution of nonlinear dynamics of MEMS thermal actuated flying-height control (TFC) slider, and employs the measured acoustic emission signal of a TFC slider during touch down as its vibration approximation to correlate with the derived closed-form solution for parameter identification. It is shown that during slider touchdown when heater power is increased gradually, the slider performs weak nonlinear vibrations in early transition phase, and exhibits linear vibration in the following steady sliding phase. These results are useful for the clarification of complicated dynamics and the designs of active sliders in sub-nanometer clearance regime.
- 出版日期2011-9
