Design and Simulation of Piezoelectric-Charge-Gated Thin-Film Transistor for Tactile Sensing

作者：Li, Weiwei; Weldon, Jeffrey A.; Huang, Yihua; Wang, Kai^*

来源：IEEE Electron Device Letters, 2016, 37(3): 325-328.

DOI：10.1109/LED.2016.2516526

• Dual-gate TFT
• electronic skin
• tactile sensor

This letter reports on an electronic device that can work as a tactile force sensor with a high spatial resolution and sensitivity. It integrates a thin-film piezoelectric sensor with a thin-film transistor (TFT) to form a dual-gate force-sensitive TFT. The piezoelectric sensor acts as a top-sensing terminal, which is charge-gated. An analytical model of the device is given to elaborate how the output current varies with the applied force, and a numerical study is conducted to evaluate its sensitivity, noise, and dynamic range. The integrated sensor can be potentially pixelated to form a high-resolution tactile sensor array, promising for electronic skin applications.

• 出版日期2016-3
• 单位中山大学