An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

作者：Yang Shih Wei; Lin Chern Sheng^*; Lin Shir Kuan; Fu Shu Hsien; Yeh Mau Shiun

来源：Assembly Automation, 2013, 33(1): 57-67.

DOI：10.1108/01445151311294720

• Inspection
• Automation
• Genetic algorithms
• Surface properties of materials
• Automatic optical inspection system
• Microlens array
• Surface profile

Purpose - The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array. %26lt;br%26gt;Design/methodology/approach - The system set-up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre-processing with a precision of less than 0.09 micron. %26lt;br%26gt;Findings - By integrating with the genetic algorithm, the XY-Table shortest moving path of the system is calculated to achieve the purpose of highspeed inspection and automatic microlens array surface profile measurement. %26lt;br%26gt;Originality/value - The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.

• 出版日期2013