Monitoring of Surface Treatment Effects on Sputter-coated Organic Film under Atomic Oxygen and Ultraviolet Irradiation

作者:Matsumoto Hiroyuki*; Matsuoka Mikihiko; Iwasaki Tatsuyuki; Kinoshita Shinobu; Noda Kazutoshi; Iwamori Satoru
来源:Chemistry Letters, 2010, 39(2): 102-103.
DOI:10.1246/cl.2010.102

摘要

We have been investigating the monitoring Of Surface treatment under ultraviolet lamp processing utilizing a quartz crystal microbalance (QCM) with organic thin film. In this Study, the behavior of surface modification oil sputter-coated organic thin film was Successfully measured by QCM. The film erosion mechanism is discussed here based oil the results of: surface analyses by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM).

  • 出版日期2010-2-5