Multilayer X-ray Mirrors Based on W/B4C with Ultrashort (d=0.7-1.5 nm) Periods

作者：Vainer Yu A^*; Kluenkov E B; Pestov A E; Prokhorov K A; Salashchenko N N; Fraerman A A; Chernov V V; Chkhalo N I

来源：Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques, 2007, 1(1): 7-12.

DOI：10.1134/S1027451007010028

A method using resonance diffuse x-ray scattering has been developed to investigate the properties of multilayer structures composed of ultrathin films. Multilayer structures W/B4C with ultra-short periods (d = 0.7-1.5 nm) have been studied using specular and diffuse x-ray scattering. The contributions of the interface roughness and the mixing of the layer materials to the total width of the transition region between the layers have been separated for these structures. Quasi-Bragg peaks in the diffuse scattering spectra have been observed experimentally, and their analysis has shown that the interface roughnesses in multilayer W/B4C structures are correlated well.

• 出版日期2007-2