A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides

作者：Cheben P^*; Schmid J H; Delage A; Densmore A; Janz S; Lamontagne B; Lapointe J; Post E; Waldron P; Xu D X

来源：Optics Express, 2007, 15(5): 2299-2306.

DOI：10.1364/OE.15.002299

We demonstrate a 50-channel high-resolution arrayed waveguide grating microspectrometer with a 0.2 nm channel spacing on a silicon-on-insulator (SOI) platform. The chip size is 8 mm x 8 mm. High channel density and spectral resolution are achieved using high aspect ratio 0.6 mu m x 1.5 mu m waveguide apertures to inject the light into the input combiner and to intercept different spectral channels at the output combiner focal region. The measured crosstalk is <-10 dB, the 3 dB channel bandwidth is 0.15 nm, and the insertion loss is -17 dB near the central wavelength of lambda = 1.545 mu m.

• 出版日期2007-3-5