摘要
A non-contact temperature sensor is described which is based on the temperature dependency of the hysteresis of a magnetic phase embedded in a non-magnetic hard coating. For the measurement principle the technique of frequency mixing is used, with extension toward phase sensitivity as indicator for the temperature. The sensor%26apos;s capabilities such as selectivity and sensitivity are investigated on TiN-FeCo magnetic multilayers. The sensor has been proven for temperatures up to 500 degrees C and shows capabilities for higher temperatures.
- 出版日期2012-5