A novel bonding method for fabrication of PMMA nanofluidic chip with low deformation of the nano-trenches

作者：Yin, Zhifu^*; Wang, Weihang

来源：Microfluidics and Nanofluidics, 2018, 22(9): 99.

DOI：10.1007/s10404-018-2121-x

• FINITE STRAIN DEFORMATION
• NANOIMPRINT LITHOGRAPHY
• POLYMER
• TRANSPORT
• DEVICES
• NANOCHANNELS
• TEMPERATURE
• ENRICHMENT
• NANOSLITS
• CHANNELS

All PMMA-based nanofluidic chips are becoming increasingly important for biological and medical applications. To fabricate PMMA nanofluidic chips, the open nano-trenches should be sealed by thermal bonding method. However, the present thermal bonding method suffers from high deformation of nano-trenches due to PMMA softening near glass transition temperature. In this work, a novel bonding technique, based on acetone and ethanol (v:v, 8:2) treatment, is developed to adjust the Young's modulus of PMMA in its surface layer. By optimizing nanoimprinting and bonding process, PMMA nanofluidic chip was fabricated without undesired nano-trench deformation. The integrity of the enclosed PMMA nanofluidic system was verified by a fluorescence filling experiment.

• 出版日期2018-9
• 单位吉林大学