Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma

作者：Abramenko D B; Spiridonov M V; Krainov P V; Krivtsun V M; Astakhov D I; Medvedev V V^*; van Kampen M; Smeets D; Koshelev K N

来源：Applied Physics Letters, 2018, 112(16): 164102.

DOI：10.1063/1.5025914

Experimental studies of stopping of ion fluxes from laser-produced plasma by a low-pressure gas atmosphere are presented. A modification of the time-of-flight spectroscopy technique is proposed for the stopping cross-sectional measurements in the ion energy range of 0.1-10 keV. The application of the proposed technique is demonstrated for Sn ion stopping by H-2 gas. This combination of elements is of particular importance for the development of plasma-based sources of extreme ultraviolet radiation for lithographic applications. Published by AIP Publishing.

• 出版日期2018-4-16