Aerosol-deposited KNN-LSO lead-free piezoelectric thick film for high frequency transducer applications

作者：Lau S T^*; Li X; Zhou Q F; Shung K K; Ryu J; Park D S

来源：Sensors and Actuators A: Physical , 2010, 163(1): 226-230.

DOI：10.1016/j.sna.2010.08.020

• Thick film technology
• Lead-free ceramics
• Ultrasonic transducer

In this report, we fabricated and characterized a high frequency transducer with lead-free piezoelectric thick film, 0.948(K0.5Na0.5)NbO3-0.052LiSbO(3), formed on a platinized silicon substrate by aerosol-deposition. X-ray diffraction analysis and scanning electron microscopy revealed that the film had well-crystallized perovskite structure and was dense and crack-free microstructure. The film showed the dielectric constant of 766 at 1 kHz and the remnant polarization of 13.2 mu C/cm(2). The film was used to fabricate a high frequency needle transducer with an aperture size of similar to 200 mu m. The center frequency of the transducer was 197 MHz and the -6 dB bandwidth was 50% which was comparable to the PZT-based transducers. A 6-mu m tungsten wire phantom was imaged to assess the -6 dB axial and lateral resolution of the transducer, which were found to be 12 and 66 mu m, respectively.

• 出版日期2010-9
• 单位NIH