AN ALN TWO-DIMENSIONAL ACOUSTIC WAVE HUMIDITY SENSOR WITH GRAPHENE OXIDE AS SENSING LAYER

作者：Le, Xianhao; Xie, Jin^*

来源：30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, 2017-01-22 To 2017-01-26.

• RESONATORS

In this paper, we firstly report an AIN thin film two-dimensional acoustic wave humidity sensor with graphene oxide ( GO) as sensing layer. The sensor with small sensing area show high sensitivity up to 218.6 kHz/10% RH with a wide detection range from 10% to 90% RH. The sensor has excellent performance in terms of repeatability and stability. Little hysteresis, fast response and short recovery time of the sensors are obtained. The TCF of the sensor is about - 15.8 ppm/degrees C, much smaller than conventional humidity sensors.

• 出版日期2017
• 单位流体动力与机电系统国家重点实验室; 浙江大学