Mechanical characterization of aluminium nanofilms

作者：Gui**iers G^*; Herth E; Buchaillot L

来源：Microelectronic Engineering, 2011, 88(5): 844-847.

DOI：10.1016/j.mee.2010.06.028

• Nanofilm
• Mechanics
• Nanoindentation
• Aluminium
• Hall-Petch

The mechanical properties (Young's modulus, hardness, wear resistance) of aluminium nanofilms on silicon substrate are studied. Size effect on these mechanical properties are exhibited. Young's modulus, hardness and wear resistance increases when the thickness is reduced. Experimental investigations have been led by atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and nanoindentation. Compared to the bulk values, hardness and wear resistance of one aluminium nanofilm (thickness = 100 nm) have increased by a factor similar to 7 whereas the Young's modulus only increased by a term similar to 15%. By comparing mechanical properties between high and low melting point materials, we conclude that high melting point materials have a decreasing behaviour of the Young's modulus with size whereas low melting point materials have an increasing one.

• 出版日期2011-5