科研之友
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摘要
This contribution reports the design, fabrication and characterization of a bulk acoustic mode resonator at VHF band using the polysilicon layer of a standard CMOS technology (AMS 0.35 mu m). The resonator is electrostatically actuated and capacitive transduced operating at 230 MHz. A discussion on frequency response enhancement with piezoresistive transduction is provided.
- 出版日期2012-10
